Foundations of mems /
Liu, Chang
Foundations of mems / Chang Liu - 2 - New delhi: Pearson education, 2012 - 576 p.
Electronics and communication
621.381 / LIU/F
Foundations of mems / Chang Liu - 2 - New delhi: Pearson education, 2012 - 576 p.
Electronics and communication
621.381 / LIU/F