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Nanofabrication Using Focused Ion and Electron Beams Principles and Applications

Ivo Utke-Stanislav Moshkalev-Phillip Russell

Nanofabrication Using Focused Ion and Electron Beams Principles and Applications - Oxford University Press 2011 - Nanomanufacturing Series .

ISBN: 9780199920990

Subjects--Topical Terms:
Electron beams--Industrial applications.,Ion bombardment--Industrial applications.,Nanostructured materials.,Nanotechnology.

Subjects--Index Terms: TECHNOLOGY & ENGINEERING / Materials Science / General

LC Class. No.: TA418.9.N35 N2525 2011eb

Dewey Class. No.: 620.1/15

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