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Introduction to Microelectromechanical Systems Engineering

By: Maluf, Nadim.-Williams, KirtMaterial type: TextTextLanguage: English Series: Artech House Microelectromechanical Systems (MEMS) SeriesPublication details: Artech House, Inc. 2004 Edition: 2nd edISBN: 9781580535915Subject(s): Microelectromechanical systems | TECHNOLOGY & ENGINEERING / Electronics / DigitalDDC classification: 621.381 LOC classification: TK7875 .M35 2004ebOnline resources: Click here to access online
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