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Thin Film Materials Stress, Defect Formation and Surface Evolution

By: Freund, L. B.-Suresh, SMaterial type: TextTextLanguage: English Publication details: Cambridge University Press 2003 ISBN: 9780511165658Subject(s): Surfaces (Technology),Thin films | TECHNOLOGY & ENGINEERING / Electronics / SemiconductorsDDC classification: 621.3815/2 LOC classification: TA418.9.T45 F74 2003ebOnline resources: Click here to access online
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