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Fundamental Principles of Optical Lithography The Science of Microfabrication

By: Chris MackMaterial type: TextTextLanguage: English Publication details: Wiley-Interscience 2007 ISBN: 9780470723869Subject(s): Integrated circuits--Design and construction.,Microlithography--Industrial applications | TECHNOLOGY & ENGINEERING / Materials Science / GeneralDDC classification: 621.3815/31 LOC classification: TK7874Online resources: Click here to access online
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