Maluf, Nadim.-Williams, Kirt. <br/><br/>
Introduction to Microelectromechanical Systems Engineering 

 - 2nd ed 
 -  Artech House, Inc.  2004 
 - Artech House Microelectromechanical Systems (MEMS) Series .
<br/><br/><label>ISBN: </label>9781580535915 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.
<br/><br/><label>Subjects--Index Terms: </label>TECHNOLOGY & ENGINEERING / Electronics / Digital 
<br/><br/><label>LC Class. No.: </label>TK7875 .M35 2004eb 
<br/><br/><label>Dewey Class. No.: </label>621.381