TY  - BOOK
AU  - Minhang Bao
TI  - Analysis and Design Principles of MEMS Devices
SN  - 9780080455624
AV  - TK7875 .B36 2005eb 
U1  - 621.381 
PY  - 2005///
PB  - Elsevier Science
KW  - Microelectromechanical systems
KW  - TECHNOLOGY & ENGINEERING / Manufacturing
UR  - https://search.ebscohost.com/login.aspx?direct=true&db=e230xww&scope=site&site=ehost-live&AN=166279
ER  -