Liu, Chang <br/><br/>
Foundations of mems / 
Chang Liu 
 - 2 
 - New delhi:  Pearson education,  2012 
 - 576 p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronics and communication
<br/><br/><label>Dewey Class. No.: </label>621.381  / LIU/F