Minhang Bao <br/><br/>
Analysis and Design Principles of MEMS Devices 

 -  Elsevier Science  2005 
<br/><br/><label>ISBN: </label>9780080455624 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.
<br/><br/><label>Subjects--Index Terms: </label>TECHNOLOGY & ENGINEERING / Manufacturing 
<br/><br/><label>LC Class. No.: </label>TK7875 .B36 2005eb 
<br/><br/><label>Dewey Class. No.: </label>621.381