H. Fukuda <br/><br/>
Rapid Thermal Processing for Future Semiconductor Devices 

 -  Elsevier Science  2003 
<br/><br/><label>ISBN: </label>9780080540269 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Rapid thermal processing--Congresses.,Semiconductors--Heat treatment--Congresses.
<br/><br/><label>Subjects--Index Terms: </label>SCIENCE / Physics / Quantum Theory 
<br/><br/><label>LC Class. No.: </label>TK7871.85 .I57665 2003eb 
<br/><br/><label>Dewey Class. No.: </label>621.3815/2