TY  - BOOK
AU  - H. Fukuda
TI  - Rapid Thermal Processing for Future Semiconductor Devices
SN  - 9780080540269
AV  - TK7871.85 .I57665 2003eb 
U1  - 621.3815/2 
PY  - 2003///
PB  - Elsevier Science
KW  - Rapid thermal processing--Congresses.,Semiconductors--Heat treatment--Congresses
KW  - SCIENCE / Physics / Quantum Theory
UR  - https://search.ebscohost.com/login.aspx?direct=true&db=e230xww&scope=site&site=ehost-live&AN=203153
ER  -