TY  - BOOK
AU  - Ivo Utke-Stanislav Moshkalev-Phillip Russell
TI  - Nanofabrication Using Focused Ion and Electron Beams: Principles and Applications
T2  - Nanomanufacturing Series
SN  - 9780199920990
AV  - TA418.9.N35 N2525 2011eb 
U1  - 620.1/15 
PY  - 2011///
PB  - Oxford University Press
KW  - Electron beams--Industrial applications.,Ion bombardment--Industrial applications.,Nanostructured materials.,Nanotechnology
KW  - TECHNOLOGY & ENGINEERING / Materials Science / General
UR  - https://search.ebscohost.com/login.aspx?direct=true&db=e230xww&scope=site&site=ehost-live&AN=434470
ER  -