TY  - BOOK
AU  - Yuan, Li
TI  - MEMS, NANO and Smart Systems
T2  - Advanced Materials Research
SN  - 9783038137689
AV  - TK7875 .I54 2011 
U1  - 621.381 
PY  - 2012///
PB  - Trans Tech Publications Ltd
KW  - Intelligent control systems--Congresses.,Microelectromechanical systems--Congresses.,Nanotechnology--Congresses.,Smart materials--Congresses.,Systems on a chip--Congresses
KW  - TECHNOLOGY & ENGINEERING / Materials Science / General
UR  - https://search.ebscohost.com/login.aspx?direct=true&db=e230xww&scope=site&site=ehost-live&AN=517102
ER  -