Tabata, Hitoshi.-Miyazaki, Seiichi. <br/><br/>
Technology Evolution for Silicon Nano-Electronics 

 -  Trans Tech Publications Ltd  2011 
 - Key Engineering Materials .
<br/><br/><label>ISBN: </label>9783038134947 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Metal oxide semiconductors--Congresses.,Nanoelectronics--Congresses.,Nanostructured materials--Congresses.
<br/><br/><label>Subjects--Index Terms: </label>TECHNOLOGY & ENGINEERING / Materials Science / General 
<br/><br/><label>LC Class. No.: </label>TK7874.84 .I58 2011eb 
<br/><br/><label>Dewey Class. No.: </label>621.3815