TY  - BOOK
AU  - Tabata, Hitoshi.-Miyazaki, Seiichi.
TI  - Technology Evolution for Silicon Nano-Electronics
T2  - Key Engineering Materials
SN  - 9783038134947
AV  - TK7874.84 .I58 2011eb 
U1  - 621.3815 
PY  - 2011///
PB  - Trans Tech Publications Ltd
KW  - Metal oxide semiconductors--Congresses.,Nanoelectronics--Congresses.,Nanostructured materials--Congresses
KW  - TECHNOLOGY & ENGINEERING / Materials Science / General
UR  - https://search.ebscohost.com/login.aspx?direct=true&db=e230xww&scope=site&site=ehost-live&AN=553066
ER  -