TY  - BOOK
AU  - Suzuki, Kunihiro.
TI  - Ion Implantation and Activation - Volume 1
T2  - Ion Implantation and Activation
SN  - 9781608057818
AV  - TN23 .S384 2013 
U1  - 622.08 
PY  - 2013///
PB  - Bentham Science Publishers
KW  - Ion implantation--Computer simulation.,Semiconductors--Design and construction--Computer simulation
KW  - TECHNOLOGY & ENGINEERING / Mining
UR  - https://search.ebscohost.com/login.aspx?direct=true&db=e230xww&scope=site&site=ehost-live&AN=657295
ER  -