Hsu, Tai-Ran <br/><br/>
Mems and microsystems design and manufacture / 
Tai-Ran Hsu 
 - New delhi:  Tata mc graw- hill,  2013 
 - 435 p. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronics and communication
<br/><br/><label>Dewey Class. No.: </label>621.381  / HSU/M