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Nanofabrication Using Focused Ion and Electron Beams Principles and Applications

By: Ivo Utke-Stanislav Moshkalev-Phillip RussellMaterial type: TextTextLanguage: English Series: Nanomanufacturing SeriesPublication details: Oxford University Press 2011 ISBN: 9780199920990Subject(s): Electron beams--Industrial applications.,Ion bombardment--Industrial applications.,Nanostructured materials.,Nanotechnology | TECHNOLOGY & ENGINEERING / Materials Science / GeneralDDC classification: 620.1/15 LOC classification: TA418.9.N35 N2525 2011ebOnline resources: Click here to access online
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