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Plasma Deposition of Amorphous Silicon-Based Materials

By: Pio Capezzuto-Arun MadanMaterial type: TextTextLanguage: English Series: Plasma--materials InteractionsPublication details: Academic Press 1995 ISBN: 9780080539102Subject(s): Amorphous semiconductors--Design and construction.,Plasma-enhanced chemical vapor deposition.,Silicon alloys | SCIENCE / Physics / GeneralDDC classification: 621.3815/2 LOC classification: TK7871.99.A45 P55 1995ebOnline resources: Click here to access online
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