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Sputtering Materials for VLSI and Thin Film Devices

By: Jaydeep SarkarMaterial type: TextTextLanguage: English Publication details: William Andrew 2011 ISBN: 9780815519874Subject(s): Flat panel displays--Materials.,Microelectronics--Materials.,Sputtering (Physics) | TECHNOLOGY & ENGINEERING / ManufacturingDDC classification: 621.381 LOC classification: TK7874Online resources: Click here to access online
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