Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods Processes, Properties and Applications
Material type: TextLanguage: English Publication details: Bentham Science Publishers 2013 ISBN: 9781608051564Subject(s): Thin films | TECHNOLOGY & ENGINEERING / MechanicalDDC classification: 621.3815/2 LOC classification: TA418.9.T45Online resources: Click here to access onlineItem type | Current library | Call number | Status | Date due | Barcode |
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E-Books | VJEC Central Library | Not for loan |
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