Rapid Thermal Processing for Future Semiconductor Devices
Material type: TextLanguage: English Publication details: Elsevier Science 2003 ISBN: 9780080540269Subject(s): Rapid thermal processing--Congresses.,Semiconductors--Heat treatment--Congresses | SCIENCE / Physics / Quantum TheoryDDC classification: 621.3815/2 LOC classification: TK7871.85 .I57665 2003ebOnline resources: Click here to access onlineItem type | Current library | Call number | Status | Date due | Barcode |
---|---|---|---|---|---|
E-Books | VJEC Central Library | Not for loan |
There are no comments on this title.