| 000 | 00818nam a2200193Ia 4500 | ||
|---|---|---|---|
| 008 | 210820s2011||||xx |||||||||||||| ||und|| | ||
| 020 | _a9780199920990 | ||
| 041 | _aeng | ||
| 050 | _aTA418.9.N35 N2525 2011eb | ||
| 082 | _a620.1/15 | ||
| 100 | _aIvo Utke-Stanislav Moshkalev-Phillip Russell | ||
| 245 | 0 |
_aNanofabrication Using Focused Ion and Electron Beams _bPrinciples and Applications |
|
| 260 |
_bOxford University Press _c2011 |
||
| 490 | _aNanomanufacturing Series | ||
| 650 | _aElectron beams--Industrial applications.,Ion bombardment--Industrial applications.,Nanostructured materials.,Nanotechnology. | ||
| 653 | _aTECHNOLOGY & ENGINEERING / Materials Science / General | ||
| 856 | _uhttps://search.ebscohost.com/login.aspx?direct=true&db=e230xww&scope=site&site=ehost-live&AN=434470 | ||
| 942 | _cEBK | ||
| 999 |
_c17264 _d17264 |
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