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MEMS Mechanical Sensors

Beeby, Stephen.

MEMS Mechanical Sensors - Artech House, Inc. 2004 - Artech House Microelectromechanical Systems (MEMS) Series .

ISBN: 9781580538732

Subjects--Topical Terms:
Detectors.,Microelectromechanical systems.

Subjects--Index Terms: TECHNOLOGY & ENGINEERING / Sensors

LC Class. No.: TK7875 .M4537 2004eb

Dewey Class. No.: 681/.2

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