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MEMS Mechanical Sensors

By: Beeby, StephenMaterial type: TextTextLanguage: English Series: Artech House Microelectromechanical Systems (MEMS) SeriesPublication details: Artech House, Inc. 2004 ISBN: 9781580538732Subject(s): Detectors.,Microelectromechanical systems | TECHNOLOGY & ENGINEERING / SensorsDDC classification: 681/.2 LOC classification: TK7875 .M4537 2004ebOnline resources: Click here to access online
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