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Analysis and Design Principles of MEMS Devices

Minhang Bao

Analysis and Design Principles of MEMS Devices - Elsevier Science 2005

ISBN: 9780080455624

Subjects--Topical Terms:
Microelectromechanical systems.

Subjects--Index Terms: TECHNOLOGY & ENGINEERING / Manufacturing

LC Class. No.: TK7875 .B36 2005eb

Dewey Class. No.: 621.381

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