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Analysis and Design Principles of MEMS Devices

By: Minhang BaoMaterial type: TextTextLanguage: English Publication details: Elsevier Science 2005 ISBN: 9780080455624Subject(s): Microelectromechanical systems | TECHNOLOGY & ENGINEERING / ManufacturingDDC classification: 621.381 LOC classification: TK7875 .B36 2005ebOnline resources: Click here to access online
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