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Analysis and design principles of mems devices[xerox] / Minhang Bao

by Bao, Minhang.

Material type: Text Text Publication details: Amsterdam: Elsevier, 2005Availability: Items available for reference: VJEC Central Library: Not for loan (3)Call number: 621.382 BAO/A, ...

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2.
Analysis and Design Principles of MEMS Devices

by Minhang Bao.

Material type: Text Text Language: English Publication details: Elsevier Science 2005Online access: Click here to access online Availability: Items available for reference: VJEC Central Library: Not for loan (1).

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