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Rapid Thermal Processing and Beyond: Applications in Semiconductor Processing

Niess, J.-Lerch, W.

Rapid Thermal Processing and Beyond: Applications in Semiconductor Processing - Trans Tech Publications Ltd 2008 - Materials Science Forum .

ISBN: 9783038131731

Subjects--Topical Terms:
Rapid thermal processing.,Semiconductors--Thermal properties.

Subjects--Index Terms: TECHNOLOGY & ENGINEERING / Materials Science / General

LC Class. No.: QC611.6.T4 R37 2008eb

Dewey Class. No.: 621.38152

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