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Rapid Thermal Processing and Beyond: Applications in Semiconductor Processing

By: Niess, J.-Lerch, WMaterial type: TextTextLanguage: English Series: Materials Science ForumPublication details: Trans Tech Publications Ltd 2008 ISBN: 9783038131731Subject(s): Rapid thermal processing.,Semiconductors--Thermal properties | TECHNOLOGY & ENGINEERING / Materials Science / GeneralDDC classification: 621.38152 LOC classification: QC611.6.T4 R37 2008ebOnline resources: Click here to access online
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