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Thin Film Chemical Vapor Deposition in Electronics Equipment, Methodology, and Thin Film Growth Experience

By: Vasilʹev, V. I︠U︡Material type: TextTextLanguage: English Series: Materials Science and Technologies SeriesPublication details: Nova Science Publishers, Inc. 2014 ISBN: 9781633211865Subject(s): Chemical vapor deposition.,Integrated circuits--Design and construction.,Thin film devices | TECHNOLOGY & ENGINEERING / MechanicalDDC classification: 621.3815 LOC classification: TK7872.T55Online resources: Click here to access online
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