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1.
MEMS Mechanical Sensors

by Beeby, Stephen.

Series: Artech House Microelectromechanical Systems (MEMS) SeriesMaterial type: Text Text Language: English Publication details: Artech House, Inc. 2004Online access: Click here to access online Availability: Items available for reference: VJEC Central Library: Not for loan (1).

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2.
Introduction to Microelectromechanical Systems Engineering

by Maluf, Nadim.-Williams, Kirt.

Series: Artech House Microelectromechanical Systems (MEMS) SeriesEdition: 2nd edMaterial type: Text Text Language: English Publication details: Artech House, Inc. 2004Online access: Click here to access online Availability: Items available for reference: VJEC Central Library: Not for loan (1).

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